Project: High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.

Acronym UFER/Ultra Fast Epoxy Removal (Reference Number: 071-CH)
Duration 01/10/2006 - 30/09/2009
Call MNT-ERA.NET Call 2006

Project partner

Number Name Role Country
1 R3T - Rapid Reactive Radicals Technology GmbH Coordinator Germany
2 Mimotec Partner Switzerland
3 Microresist Technology Partner Germany
4 Bessy GmbH Partner Germany
5 Interstate University of Applied Sciences Buchs Partner Switzerland