Full name | Bessy GmbH |
Short name | Bessy GmbH |
Type of organisation | |
Partner Role | Partner |
Country | Germany |

High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.
Full name | Bessy GmbH |
Short name | Bessy GmbH |
Type of organisation | |
Partner Role | Partner |
Country | Germany |
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