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High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.

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MNT-ERA.NET
MNT-ERA.NET Call 2006
High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.
Mimotec

Full name	Mimotec
Short name	Mimotec
Type of organisation
Partner Role	Partner
Country	Switzerland

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Funded by the European Union under the Grant Agreement no. 101102316. Views and opinions expressed are those of the author(s) only and do not necessarily reflect those of the European Union or the European Commission. Neither the European Union nor the granting authority can be held responsible for them.

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