Project: Vacuum metrology for production environments

Historically, vacuum has been an important tool in industry and has been used in many applications, ranging from protecting light filaments from chemical degradation to controlling the flow of current in electronics. The use of vacuum is still important today, in modern lighting, the semiconductor industry and fusion power research. However, previously, vacuum was poorly understood when used outside the laboratory, as traditional measurements were unsuitable and based on the pressures of pure gases in stable conditions. This project has enabled the reliable characterisation of fast changing vacuum pressures, and partial pressure and outgassing rate measurements can now be made traceable for the first time. New technologies were applied to provide new leak standards with predictable leak rates for many gas species applicable to typical industrial environments. The improved measurements will lead to a more efficient use of vacuum and better end products.

Acronym IND12 Vacuum (Reference Number: IND12)
Duration 01/09/2011 - 31/08/2014
Project Topic Metrology
Project Results
(after finalisation)
See Website
Website visit project website
Network EMRP
Call EMRP Call 2010 - Industry and Environment

Project partner

Number Name Role Country
1 Physikalisch-Technische Bundesanstalt Coordinator Germany
2 Centro Español de Metrología Partner Spain
3 Cesky Metrologicky Institut Partner Czech Republic
4 Institut za Kovinske Materiale in Tehnologije Partner Slovenia
5 Istituto Nazionale di Ricerca Metrologica Partner Italy
6 Laboratoire national de métrologie et d'essais Partner France
7 Turkiye Bilimsel ve Teknolojik Arastirma Kurumu Partner Turkey
8 Danfoss A/S Observer Denmark
9 INFICON AG Observer Liechtenstein
10 INFICON GmbH Observer Germany
11 Lazzero Tecnologie SrI Observer Italy
12 VACOM Vakuum Komponenten & Messtechnik GmbH Observer Germany
13 Università degli Studi di Genova Italy