Project: Vacuum metrology for production environments

Historically, vacuum has been an important tool in industry and has been used in many applications, ranging from protecting light filaments from chemical degradation to controlling the flow of current in electronics. The use of vacuum is still important today, in modern lighting, the semiconductor industry and fusion power research. However, previously, vacuum was poorly understood when used outside the laboratory, as traditional measurements were unsuitable and based on the pressures of pure gases in stable conditions. This project has enabled the reliable characterisation of fast changing vacuum pressures, and partial pressure and outgassing rate measurements can now be made traceable for the first time. New technologies were applied to provide new leak standards with predictable leak rates for many gas species applicable to typical industrial environments. The improved measurements will lead to a more efficient use of vacuum and better end products.

Acronym	IND12 Vacuum (Reference Number: IND12)
Duration	01/09/2011 - 31/08/2014
Project Topic	Metrology
Project Results (after finalisation)	See Website
Website	visit project website
Network	EMRP
Call	EMRP Call 2010 - Industry and Environment

Project partner

Number	Name	Role	Country
1	Physikalisch-Technische Bundesanstalt	Coordinator	Germany
2	Centro Español de Metrología	Partner	Spain
3	Cesky Metrologicky Institut	Partner	Czech Republic
4	Institut za Kovinske Materiale in Tehnologije	Partner	Slovenia
5	Istituto Nazionale di Ricerca Metrologica	Partner	Italy
6	Laboratoire national de métrologie et d'essais	Partner	France
7	Turkiye Bilimsel ve Teknolojik Arastirma Kurumu	Partner	Türkiye
8	Danfoss A/S	Observer	Denmark
9	INFICON AG	Observer	Liechtenstein
10	INFICON GmbH	Observer	Germany
11	Lazzero Tecnologie SrI	Observer	Italy
12	VACOM Vakuum Komponenten & Messtechnik GmbH	Observer	Germany
13	Università degli Studi di Genova		Italy