Project: Metrology of small structures for the manufacturing of electronic and optical devices

The reliable measurement of small structures, less than one micrometre in size, is necessary to develop optical and semiconductor technologies that are dependent on the miniaturisation of components. Scatterometry is a tool that measures by scattering light across a surface and detecting the reflections. It is relatively fast compared with traditional techniques such as Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), and could be more widely used during manufacturing processes were it not for a lack of universal standards. This project will provide a scatterometry reference standard, also suitable for testing AFM and SEM devices that will add traceability to scatterometric measurements and make them comparable to microscopic methods.

Acronym IND17 Scatterometry (Reference Number: IND17)
Duration 01/10/2011 - 30/09/2014
Project Topic Metrology
Project Results
(after finalisation)
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Website visit project website
Network EMRP
Call EMRP Call 2010 - Industry and Environment

Project partner

Number Name Role Country
1 Physikalisch-Technische Bundesanstalt Coordinator Germany
2 Cesky Metrologicky Institut Partner Czech Republic
3 Dansk Fundamental Metrologi A/S Partner Denmark
4 Teknologian tutkimuskeskus VTT Oy Partner Finland
5 NPL Management Limited Partner United Kingdom
6 VSL B.V. Partner Netherlands
7 Nanocomp Oy Ltd Observer Finland
8 JCMwave GmbH Germany
9 Itä-Suomen yliopisto Finland