Project: Metrology for Airborne Molecular Contaminants II

Acronym 17IND09 MetAMCII (Reference Number: 17IND09)
Duration 01/05/2018 - 30/04/2021
Project Topic European semiconductor sales amount to approximately €32 billion per year, representing 10 % of the global share. Progress is driven by the ability to operate at increasingly smaller scales and with greater complexity. A key challenge facing the industry is production loss due to Airborne Molecular Contamination (AMC) in the form of vapours and aerosols, which can corrode metal surfaces and form contamination layers during microscale manufacturing processes. Existing monitoring instrumentation is often deficient, and since 1997 there have been 24 major production losses due to AMC, each with a value of up to €80 million.This project will develop new spectroscopic techniques and reference materials to measure priority AMCs (HCl and NH3) at lower concentrations (
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Network EMPIR
Call EMPIR Call 2017

Project partner

Number Name Role Country
1 NPL Management Limited Coordinator United Kingdom
2 Cesky Metrologicky Institut Partner Czech Republic
3 Physikalisch-Technische Bundesanstalt Partner Germany
4 VSL B.V. Partner Netherlands
5 Teknologian tutkimuskeskus VTT Oy Partner Finland
6 Gasera Oy Partner Finland
7 Optoseven Oy Partner Finland
8 Politecnico di Torino Observer Italy