Project: High resolution sensing for miniature MEMS laser scanning

Background:_x000D_The project “HighResSensing” focuses on the development of miniaturized (< 1cm3) laser scanning modules (LSM) that are suitable for future generation products, which require miniaturized laser scanning. Examples of such potential applications are: _x000D_- Medical diagnostics (e.g. Optical Coherence Tomography that check tissue till 2mm depth for early detection of malignant tissue);_x000D_- Large multi-touch screens for class rooms and gaming applications;_x000D_- Optical measurement market enabling accurate hand held measuring devices, such as laser vibro measurement,analyzing of micro organisms, IR temperature measurement,etc);_x000D_- Laser printing for cheaper, faster and more precise printing. Using MEMS based LSM's will reduce the BOM of a laser printer with a few percent and enables 20-40% faster printing at even higher resolutions;_x000D_- Gesture control for game consoles (eg Kinect, Wii, etc), TV and laptops;_x000D_- Integrated laser based pico-projectors for pocket camera's, tablet PC, laptops, game consoles and mobile phones._x000D_The value proposition of these applications is validated by means of serious interest of well established players in the different applications fields. The P group has chosen for a platform approach in developing the specific LSM's for the mentioned applications. This means that development is split into generic LSM related technology programs and product development programs for the specific applications (although some applications have almost similar specifications: medical diagnostics & optical measurement,large multi-touch screens & laser printing and gesture control & projection)._x000D__x000D_The generic LSM related technology program consists of five sub-programs:_x000D_1) Increased tilt angle of the MEMS mirror;_x000D_2) ASIC development for sensing and controlling resonant MEMS mirror;_x000D_3) Sensing functionality for resonant MEMS mirror;_x000D_4) ASIC development for sensing and controlling direct drive MEMS mirror;_x000D_5) Direct drive MEMS development with sensing capability._x000D_The research program on increased tilt angle is nearly completed. A larger scan angle is a prerequisite for a significant field of view (FoV), i.e. most markets request a FoV of more than 60 deg. Innoluce is in the final phase of designing MEMS mirrors with a FoV of more than 80 deg. Lifetime and reliablity has still to be proven. _x000D_All laser scanning applications mentioned earlier require a feedback signal with respect to the position of the mirror(s). In current state-of-the-art technology, external optical measuring methods are applied, which are relatively bulky. Integrating this measuring functionality in the combination MEMS & ASIC, results in a significant reduction of the LSM size and this is the CO goal of the technology sub-programs 2 to 5. The complexity here is measuring the exact location of the mirror (angular position deviation <3 mrad), and to be able to control the mirror with an extreme time accuracy (on a pico second timescale). _x000D_The sensing development is subdivided in programs for a resonant MEMS mirror (sub-programs 2 and 3) and programs for a direct drive MEMS mirror (sub-programs 4 and 5). The resonant MEMS mirrors are targeted for the higher frequencies > 250 Hz – 150 kHz, whereas the direct drive MEMS mirrors are suitable for the lower frequencies < 500 Hz. Driving a resonant or direct drive mirror differs significantly in relation to the controlling and sensing. Hence, the development is done in separate technology programs._x000D_The technology developed in the sub-programs 1, 2, and 3, will be used in all MEMS mirrors and LSM's. The programs related to the direct drive development (sub-programs 4 and 5) will enable the development of the LSM's for the gesture and projection market, where scanning in two directions (2D applications) is necessary. As already mentioned, the increased tilt angle program is in the final phase, therefore, this Eurostars application is focused on the sensing for direct drive and resonant programs._x000D__x000D_ Goals:_x000D_The aim of the Eurostars project is: _x000D_- the integration of several components: sensor, control system (Application-Specific Integrated Circuit: ASIC), and the MEMS mirrors in one module (LSM); _x000D_- the development of an high resolution (10x standard) integrated measuring method;_x000D_- the miniaturization of the technology (LSM < 1 cm3), and _x000D_- the development and testing of a prototype as “proof of concept” for the gesture and/or projection market._x000D__x000D_Introduction of the consortium: _x000D_The project brings together key players in Europe in the field of: MEMS fabrication, ASIC design for driving & controlling MEMS devices, MEMS research and application_x000D_- Innoluce BV (a high-tech start-up, spin-off of Philips Electronics), the Netherlands: MEMS design and project coordinator _x000D_- Bruco Integral Circuits BV, The Netherlands: ASIC development _x000D_- Silex Microsystems, Sweden: MEMS fabrication and process development_x000D_- VTT Technical Research Centre of Finland, Finland: Modelling MEMS mirrors_x000D_

Acronym HighResSensing (Reference Number: 6598)
Duration 01/10/2011 - 31/12/2014
Project Topic The aim of the project is to develop and integrate resonant (fast) & direct-drive (slow) Micro Electro Mechanical System (MEMS) mirrors in a Laser Scanning Module (LSM), using high resolution (> 10x current standard) capacitive sensing to determine the position of the two mirrors in realtime.
Network Eurostars
Call Eurostars Cut-Off 6

Project partner

Number Name Role Country
4 Innoluce BV Coordinator Netherlands
4 Bruco Integrated Circuits BV Partner Netherlands
4 VTT Technical Research Centre of Finland Partner Finland
4 Silex Microsystems Partner Sweden