Project: Mid-infrared system utilizing LEVEl-crossing chirp-Spectroscopy in Quantum Cascade Lasers
| Acronym | LEVES (Reference Number: 12309) |
| Duration | 01/12/2018 |
| Project Topic | A novel Mid-IR compact process monitoring system will be delivered for in-situ process monitoring in the semiconductor industry, plasma process diagnostics, environmental and exhaust gas monitoring. Its core constitutes a cost-efficient Fabry-Perot cavity quantum cascade laser (FP-QCL) with an innovative, ground-breaking approach for tailored chirped emission, yielding a 20 cm-1 spectral tuning range at one of the targeted wavelengths at 4.5, 7.5 or 9.7 µm with the output power of 50 mW. |
| Network | Eurostars 2 |
| Call | Eurostars Cut–off 9 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 1 | neoplas control GmbH | Coordinator | Germany |
| 2 | Alpes Lasers SA | Partner | Switzerland |
| 3 | Centre Suisse d’Electronique et de Microtechnique | Partner | Switzerland |
| 4 | Leibniz Institute for Plasma Science and Technology e.V. | Partner | Germany |