Project: Systems for improved industrial thin-film production using plasma assisted PVD

Acronym IonDrive (Reference Number: 114277)
Duration 01/09/2020 - 01/09/2022
Project Topic We will develop systems and instrumentation to facilitate use of a recent thin film deposition method, bipolar HiPIMS, which compared to DC magnetron or HiPIMS generates more ions, with tuneable energies and no need for a DC bias - very desirable for high quality coatings especially when reactive sputtering is necessary. Three product ranges will result: fast-pulse power supplies, an energy resolving mass spectrometer, and complete industrial coating systems using the new technologies.
Network Eurostars 2
Call Eurostars Cut–off 13

Project partner

Number Name Role Country
1 IONAUTICS AB Coordinator Sweden
2 Berner Fachhochschule Partner Switzerland
3 Empa Partner Switzerland
4 EVATEC AG Partner Switzerland
5 Linköpings Universitet Partner Sweden
6 TOFWERK AG Partner Switzerland