Project: Metrology for airborne molecular contamination in manufacturing environments

The ability to operate at smaller scales brings with it technical progress but also a need for tighter control of manufacturing environments. Airborne molecular contamination in the form of vapours or aerosols can have adverse effects on small scale products, processes or instruments and this can lead to the corrosion of metal surfaces or the formation of contamination layers. This is a particular problem in the semiconductor, nanotechnology, photovoltaic and LED industries. These industries demand continuous measurement and control of airborne molecules to optimise production processes, particularly when taking new techniques to smaller scales. The main sources of contamination are the chemicals used during manufacturing such as acids, bases, dopants and metals, some of which require detection at the parts per billion level. This project will use state-of-the-art techniques for practical airborne molecular contamination monitoring to develop portable ultra-sensitive monitoring equipment for use in manufacturing environments. It will also develop new material generation methods to help reliably calibrate industrial equipment.

Acronym	IND63 MetAMC (Reference Number: IND63)
Duration	01/05/2013 - 30/04/2016
Project Topic	Metrology
Project Results (after finalisation)	See Website
Website	visit project website
Network	EMRP
Call	EMRP Call 2012 - Industry, SI Broader Scope and Open Excellence

Project partner

Number	Name	Role	Country
1	Teknologian tutkimuskeskus VTT Oy	Coordinator	Finland
2	Cesky Metrologicky Institut	Partner	Czech Republic
3	Istituto Nazionale di Ricerca Metrologica	Partner	Italy
4	NPL Management Limited	Partner	United Kingdom
5	Physikalisch-Technische Bundesanstalt	Partner	Germany
6	VSL B.V.	Partner	Netherlands
7	HC Photonics Corporation Limited	Observer	Taiwan
8	Politecnico di Torino		Italy