Project: Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology

Nanoscale length measurement standards are currently only available down to 6 nm and 70 nm, for step height and lateral pitch, respectively, due to limitations in the technology used to produce them. The development of new dimensional standards which surpass this limit would support the invention of new products for climate change, sustainable energy and life science applications. This project will develop new types of dimensional standards using crystalline surfaces, self-assembled structures and nano-origami for step height and lateral resolution measurements. These new standards can be used for scanning probe microscopy and interference microscopy and will be tailored to the demands of the semiconductor and nanotechnology industries. The prototypes will enable manufacturers to make higher resolution measurements and stimulate innovation in the semiconductor market. They will also enable the traceable measurement of nanoparticles and carbon nanotubes, which are of great interest to the environmental and health sectors.

Acronym SIB61 CRYSTAL (Reference Number: SIB61)
Duration 01/10/2013 - 30/09/2016
Project Topic Metrology
Project Results
(after finalisation)
See Website
Website visit project website
Network EMRP
Call EMRP Call 2012 - Industry, SI Broader Scope and Open Excellence

Project partner

Number Name Role Country
1 Physikalisch-Technische Bundesanstalt Coordinator Germany
2 Cesky Metrologicky Institut Partner Czech Republic
3 Dansk Fundamental Metrologi A/S Partner Denmark
4 Istituto Nazionale di Ricerca Metrologica Partner Italy
5 Teknologian tutkimuskeskus VTT Oy Partner Finland
6 NPL Management Limited Partner United Kingdom
7 Aalto-korkeakoulusäätiö Finland
8 Fyzikální ústav AV ČR, v.v.i. Czech Republic
9 Universita Degli Studi del Piemonte Orientale Amedeo Avogadro Italy