Project: Towards a documentary standard for an ionisation vacuum gauge

Acronym 16NRM05 Ion gauge (Reference Number: 16NRM05)
Duration 01/06/2017 - 31/05/2020
Project Topic High and ultra-high vacuums are used for cutting edge materials research and in the production of microelectronics. Ionisation gauges are the only method for measuring pressure in such vacuums. Different approaches to constructing ionisation gauges, and different gasses used for the ionisation process, has lead to significant differences in the relative sensitivity factors between them with all lacking long-term stability. The performance of the approaches could be greatly improved by standardisation.This project will use results from EMRP project IND12 Vacuum and EMPIR project 14SIP01 Vacuum ISO to specify all relevant parameters for an improved and standardised ionisation gauge, including gathering data on the relative sensitivities of gasses used in different gauge types. The technical results will inform new ISO standards on ionisation gauges. A standardised ionisation gauge with long term stability will provide a reliable reference standard for calibration laboratories, and be easily reproduced by manufacturers, allowing them to meet the forthcoming standard. This will provide greater accuracy to the vacuum market, and the many industries it supports.
Website visit project website
Network EMPIR
Call EMPIR Call 2016

Project partner

Number Name Role Country
1 Physikalisch-Technische Bundesanstalt Coordinator Germany
2 Cesky Metrologicky Institut Partner Czech Republic
3 Institut za Kovinske Materiale in Tehnologije Partner Slovenia
4 Laboratoire national de métrologie et d'essais Partner France
5 RISE Research Institutes of Sweden AB Partner Sweden
6 European Organization for Nuclear Research Partner zy
7 Faculdade de Ciências e Tecnologia Universidade Nova de Lisboa Partner Portugal
8 VACOM Vakuum Komponenten & Messtechnik GmbH Partner Germany
9 INFICON AG Observer Liechtenstein