Project: Traceable three-dimensional nanometrology

Metrology for accurate and traceable nanoscale 3D measurement The demand for smaller and higher-performance electronic devices in our everyday lives requires the development of increasingly smaller and more sophisticated nanoscale components. Yet current techniques to measure the dimensions of nano-objects are inadequate for emerging needs, as the uncertainties involved are too great to meet the requirements of industry and scientific research. Conventional 3D metrology, using coordinate measuring machines, is accurate to almost one nanometre, but an emerging class of scanning probe microscopes (SPM) have the potential to exceed this level of accuracy beyond the nanometre level. However, standardised SPM techniques, traceable to reference measures, have not yet been devised. This project will build on the achievements of EMRP project NEW01 Trend by developing SPM-based approaches to measure objects in three dimensions, which can be traced reliably to reference measures. More accurate nano-measurement will support the development of new and higher-performance devices in fields as diverse as medicine, energy capture and storage, and space exploration, offering the potential for broad technological and societal impact.

Acronym 15SIB09 3DNano (Reference Number: 15SIB09)
Duration 01/10/2016 - 01/10/2019
Project Topic Metrology
Project Results
(after finalisation)
See Website
Website visit project website
Network EMPIR
Call EMPIR CALL 2015

Project partner

Number Name Role Country
1 Teknologian tutkimuskeskus VTT Oy Coordinator Finland
2 Cesky Metrologicky Institut Partner Czech Republic
3 Dansk Fundamental Metrologi A/S Partner Denmark
4 NPL Management Limited Partner United Kingdom
5 Physikalisch-Technische Bundesanstalt Partner Germany
6 Federale Overheidsdienst Economie, KMO, Middenstand en Energie Partner Belgium
7 VSL B.V. Partner Netherlands
8 Friedrich-Alexander-Universität Erlangen - Nürnberg Partner Germany
9 National Center for Scientific Research "Demokritos" Partner Greece
10 Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO Partner Netherlands
11 Istituto Nazionale di Ricerca Metrologica Observer Italy
12 Eidgenössisches Institut für Metrologie METAS Observer Switzerland