Project: Technical Specifications for quadrupole mass spectrometers and outgassing rates for assessing the quality of vacuum environments

Consumer demand for faster, smarter and cheaper technologies is driving innovation in high value-added manufacturing. To satisfy these demands, industry is increasingly developing solutions based on 3D architectures, 3D printing and a rapidly expanding library of complex innovative materials. These techniques can create severe measurement difficulties such as the characterisation of the interface between the organic and inorganic materials used in the semiconductor industry. There is therefore an urgent need for beyond state-of-the-art measurement capabilities to allow exploitation of innovative complex materials. This project will develop advanced measurement techniques for 3D-resolved chemical composition and interfacial material properties providing industry with trusted measurement capability and standardisation techniques. This will support the development of new, innovative products, enhancing the competitiveness of European industry.

Acronym 14SIP01 Vacuum ISO (Reference Number: 14SIP01)
Duration 01/05/2015 - 30/04/2018
Project Topic Metrology
Project Results
(after finalisation)
See Website
Website visit project website
Network EMPIR
Call EMPIR CALL 2014

Project partner

Number Name Role Country
1 Physikalisch-Technische Bundesanstalt Coordinator Germany
2 Institut za Kovinske Materiale in Tehnologije Partner Slovenia