Project: Developing traceable capabilities in thermal metrology

The purpose of this SIP is to develop two Technical Specifications at the ISO level; the first Technical Specification is on how to characterise and calibrate quadrupole mass spectrometers (QMS), and the second is on how to perform traceable outgassing rate measurements. These two related Technical Specifications should enable the improvement of materials for the semiconductor industry and make the control of partial pressures in industrial processes more reliable. The Technical Specifications should also help manufacturers of QMS to improve their metrological performance.

Acronym 14RPT05 Eura-Thermal (Reference Number: 14RPT05)
Duration 01/06/2015 - 31/05/2018
Project Topic Metrology
Project Results
(after finalisation)
See Website
Website visit project website
Network EMPIR
Call EMPIR CALL 2014

Project partner

Number Name Role Country
1 Laboratoire national de métrologie et d'essais Coordinator France
2 Cesky Metrologicky Institut Partner Czech Republic
3 Conservatoire national des arts et metiers Partner France
4 Sveuciliste U Zagrebu, Fakultet Strojarstva I Brodogradnje Partner Croatia
5 Institut za mjeriteljstvo Bosne i Hercegovine Partner Bosnia and Herzegovina
6 Magyar Kereskedelmi Engedelyezesi Hivatal Partner Hungary
7 Ministry of Economy Partner Serbia
8 National Standards Authority of Ireland Partner Ireland
9 Turkiye Bilimsel ve Teknolojik Arastirma Kurumu Partner Turkey
10 Univerza v Ljubljani Partner Slovenia
11 Institut Za Nuklearne Nauke Vinca Partner Serbia