Project: Towards Autonomous Large Area Mass Production Sputtering Plants
| Acronym | OUTERMOST (Reference Number: 10310) |
| Duration | 01/04/2016 - 01/04/2019 |
| Project Topic | To develop and pilot a plant-wide intelligent Supervisory Process Control System (iSPCS) prototype for controlling large area sputtering plants with multiple sputtering process modules, together with a target user and leading research institutions in their respective fields. Result: iSPCS prototype validated in operational environment and demonstrated ability to provide long term plant-wide supervisory process control, bridging the existing gap towards the full automation. |
| Network | Eurostars 2 |
| Call | Eurostars Cut-Off 4 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 23606 | Nova Fabrica | Coordinator | Lithuania |
| 23607 | GroGlass | Partner | Latvia |
| 23608 | University of Coimbra | Partner | Portugal |
| 23609 | Korea Institute of Materials Science | Partner | Korea, Republic of |