Project: Commercial resist materials based on polyphthalaldehydes for advanced lithography applications
The polymer poly(phthalaldehyde) (PPA) is a material with remarkable properties for a wide range of applications, especially as a lithographic resist. This PPA-Litho project will enable the first commercial production of this outstanding polymer and lithographic resists using it. This will enable the participating SME's to gain a global market-leading position, especially in the area of thermal scanning probe lithography.
| Acronym | PPA-Litho (Reference Number: 9045) |
| Duration | 03/11/2014 - 01/05/2017 |
| Project Topic | Chemistry, Physical And Exact Sciences |
| Network | Eurostars 2 |
| Call | Eurostars Cut-Off 1 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 19276 | Allresist Gesellschaft für chemische Produkte und Mikrostrukturierung mbH | Coordinator | Germany |
| 19277 | SwissLitho AG | Partner | Switzerland |
| 19278 | Joanneum Research Forschungsgesellschaft mbH, MATERIALS Institut für Oberflächentechnologien und Photonik | Partner | Austria |
| 19279 | Institut für Dünnschichttechnologie und Mikrosensorik e.V. | Partner | Germany |
| 19280 | Aglycon Dr. Spreitz KG | Partner | Austria |