Project: Commercial resist materials based on polyphthalaldehydes for advanced lithography applications

The polymer poly(phthalaldehyde) (PPA) is a material with remarkable properties for a wide range of applications, especially as a lithographic resist. This PPA-Litho project will enable the first commercial production of this outstanding polymer and lithographic resists using it. This will enable the participating SME's to gain a global market-leading position, especially in the area of thermal scanning probe lithography.

Acronym PPA-Litho (Reference Number: 9045)
Duration 03/11/2014 - 01/05/2017
Project Topic Chemistry, Physical And Exact Sciences
Network Eurostars 2
Call Eurostars Cut-Off 1

Project partner

Number Name Role Country
19276 Allresist Gesellschaft für chemische Produkte und Mikrostrukturierung mbH Coordinator Germany
19277 SwissLitho AG Partner Switzerland
19278 Joanneum Research Forschungsgesellschaft mbH, MATERIALS Institut für Oberflächentechnologien und Photonik Partner Austria
19279 Institut für Dünnschichttechnologie und Mikrosensorik e.V. Partner Germany
19280 Aglycon Dr. Spreitz KG Partner Austria